Etching of Silicon Carbide Using Chlorine Trifluoride Gas
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منابع مشابه
High-rate electrochemical capacitors based on ordered mesoporous silicon carbide-derived carbon.
Microporous carbons, produced by selective etching of metal carbides in a chlorine-containing environment, offer narrow distribution of micropores and one of the highest specific capacitances reported when used in electrical double layer capacitors (EDLC) with organic electrolytes. Previously, the small micropores in these carbons served as an impediment to ion transport and limited the power s...
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